Zeitschriftenartikel (15)

  1. 1.
    K. Pfeiffer, S. Shestaeva, A. Bingel, P. Munzert, L. Ghazaryan, C. van Helvoirt, W. M. M. Kessels, U. Sanli, C. Grévent, G. Schütz, M. Putkonen, I. Buchanan, L. Jensen, D. Ristau, A. Tünnermann, and A. Szeghalmi, "Comparative study of ALD SiO2 thin films for optical applications," Optical Materials Express 6 (2), 660-670 (2016).
  2. 2.
    K. Keskinbora, C. Grévent, M. Hirscher, M. Weigand, and G. Schütz, "Single-step 3D nanofabrication of kinoform optics via gray-scale focused ion beam lithography for efficient X-ray focusing," Advanced Optical Materials 3, 792-800 (2015).
  3. 3.
    K. Keskinbora, U. Sanli, C. Grévent, and G. Schütz, "Fabrication and X-ray testing of true kinoform lenses with high efficiencies," Proceedings of SPIE 9592, 95920H (2015).
  4. 4.
    K. Keskinbora, U. Sanli, C. Grévent, M. Hirscher, and G. Schütz, "Focused ion beam micromachining enables novel optics for X-ray microscopy," Microscopy and Microanalysis 21 (Suppl 3), 1983-1984 (2015).
  5. 5.
    U. Sanli, K. Keskinbora, C. Grévent, and G. Schütz, "Overview of the multilayer-Fresnel zone plate and the kinoform lens development at MPI for Intelligent Systems," Proceedings of SPIE 9510, 95100U (2015).
  6. 6.
    U. Sanli, K. Keskinbora, K. Gregorczyk, J. Leister, N. Teeny, C. Grévent, M. Knez, and G. Schütz, "High resolution, high efficiency mulitlayer Fresnel zone plates for soft and hard X-rays," Proceedings of SPIE 9592, 95920F (2015).
  7. 7.
    U. Sanli, K. Keskinbora, C. Grévent, A. Szeghalmi, M. Knez, and G. Schütz, "Multilayer Fresnel zone plates for X-ray microscopy," Microscopy and Microanalysis 21 (Suppl 3), 1987-1988 (2015).
  8. 8.
    K. Keskinbora, A.-L. Robisch, M. Mayer, U. Sanli, C. Grévent, C. Wolter, M. Weigand, A. Szeghalmi, Mato Knez, T. Salditt, and G. Schütz, "Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV," Optics Express 22 (15), 18440-18453 (2014).
  9. 9.
    M. Mayer, K. Keskinbora, C. Grévent, A. Szeghalmi, M. Knez, M. Weigand, A. Snigirev, I. Snigireva, and G. Schütz, "Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling. Erratum," Journal of Synchrotron Radiation 640, 640-640 (2014).
  10. 10.
    K. Keskinbora, C. Grévent, M. Bechtel, M. Weigand, E. Goering, A. Nadzeyka, P. Lloyd, S. Rehbein, G. Schneider, R. Follath, J. Vila-Comamala, H. Yan, and G. Schütz, "Ion beam lithography for Fresnel zone plates in X-ray microscopy," Optics Express 21 (10), 11747-11756 (2013).
  11. 11.
    K. Keskinbora, C. Grévent, U. Eigenthaler, M. Weigand, and G. Schütz, "Rapid prototyping of Fresnel zone plates via direct Ga+ ion beam lithography for high-resolution x-ray imaging," ACS Nano 7 (11), 9788-9797 (2013).
  12. 12.
    K. Keskinbora, A.-L. Robisch, M. Mayer, C. Grévent, A. V. Szeghalmi, M. Knez, M. Weigand, I. Snigireva, A. Snigirev, T. Salditt, and G. Schütz, "Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays," Proceedings of SPIE (The International Society for Optical Engineering) 8851, 885119 (2013).
  13. 13.
    M. Mayer, K. Keskinbora, C. Grévent, A. Szeghalmi, M. Knez, M. Weigand, A. Snigirev, I. Snigereva, and G. Schütz, "Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling," Journal of Synchrotron Radiation 20, 433-440 (2013).
  14. 14.
    A. Nadzeyka, L. Peto, S. Bauerdick, M. Mayer, K. Keskinbora, C. Grévent, M. Weigand, M. Hirscher, and G. Schütz, "Ion beam lithography for direct patterning of high accuracy large area X-ray elements in gold on membranes," Special Issue: Micro- and Nano-Engineering (MNE) Sept. 19-23, 2011, Berlin, selected contributions: Part II , 198-201 (2012).
  15. 15.
    M. Mayer, C. Grévent, A. Szeghalmi, M. Knez, M. Weigand, S. Rehbein, G. Schneider, B. Baretzky, and G. Schütz, "Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures," Ultramicroscopy 111, 1706-1711 (2011).
 
loading content