@article{3963, title = {Model-based Design Analysis and Yield Optimization}, author = {Pfingsten, T. and Herrmann, D. and Rasmussen, CE.}, journal = {IEEE Transactions on Semiconductor Manufacturing}, volume = {19}, number = {4}, pages = {475-486}, organization = {Max-Planck-Gesellschaft}, school = {Biologische Kybernetik}, month = feb, year = {2006}, doi = {10.1109/TSM.2006.883589}, month_numeric = {2} }