@article{HennigD2007, title = {Point-spread functions for backscattered imaging in the scanning electron microscope }, author = {Hennig, P. and Denk, W.}, journal = {Journal of Applied Physics }, volume = {102}, number = {12}, pages = {1-8}, month = dec, year = {2007}, doi = {10.1063/1.2817591}, month_numeric = {12} }