@article{escidoc:0213, title = {{Ion beam lithography for Fresnel zone plates in X-ray microscopy}}, author = {Keskinbora, K. and Gr\'event, C. and Bechtel, M. and Weigand, M. and Goering, E. and Nadzeyka, A. and Lloyd, P. and Rehbein, S. and Schneider, G. and Follath, R. and Vila-Comamala, J. and Yan, H. and Sch\"utz, G.}, journal = {{Optics Express}}, volume = {21}, number = {10}, pages = {11747--11756}, publisher = {Optical Society of America}, address = {Washington, DC}, year = {2013}, doi = {10.1364/OE.21.011747} }