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Towards automated nanoassembly with the atomic force microscope: A versatile drift compensation procedure

2009

Article

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Author(s): Krohs, Florian and Onal, Cagdas and Sitti, Metin and Fatikow, Sergej
Journal: Journal of Dynamic Systems, Measurement, and Control
Volume: 131
Number (issue): 6
Pages: 061106
Year: 2009
Publisher: American Society of Mechanical Engineers

Department(s): Physical Intelligence
Bibtex Type: Article (article)

BibTex

@article{krohs2009towards,
  title = {Towards automated nanoassembly with the atomic force microscope: A versatile drift compensation procedure},
  author = {Krohs, Florian and Onal, Cagdas and Sitti, Metin and Fatikow, Sergej},
  journal = {Journal of Dynamic Systems, Measurement, and Control},
  volume = {131},
  number = {6},
  pages = {061106},
  publisher = {American Society of Mechanical Engineers},
  year = {2009}
}