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Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays

2013

Article

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Author(s): Keskinbora, K. and Robisch, A.-L. and Mayer, M. and Grévent, C. and Szeghalmi, A. V. and Knez, M. and Weigand, M. and Snigireva, I. and Snigirev, A. and Salditt, T. and Schütz, G.
Journal: {Proceedings of SPIE (The International Society for Optical Engineering)}
Volume: 8851
Year: 2013

Department(s): Modern Magnetic Systems
Bibtex Type: Article (article)

DOI: 10.1117/12.2027251
Language: eng

BibTex

@article{escidoc:0224,
  title = {{Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays}},
  author = {Keskinbora, K. and Robisch, A.-L. and Mayer, M. and Gr\'event, C. and Szeghalmi, A. V. and Knez, M. and Weigand, M. and Snigireva, I. and Snigirev, A. and Salditt, T. and Sch\"utz, G.},
  journal = {{Proceedings of SPIE (The International Society for Optical Engineering)}},
  volume = {8851},
  year = {2013},
  doi = {10.1117/12.2027251}
}