Shape control in wafer-based aperiodic 3D nanostructures
2014
Article
pf
Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continuous sacrificial corral surrounding the features of interest we grow isolated 3D nanostructures that have complex cross-sections and sidewall morphology that are surrounded by zones of clean substrate.
Cover article.
Author(s): | Hyeon-Ho, Jeong and Mark, Andrew G. and Gibbs, John G. and Reindl, Thomas and Waizmann, Ulrike and Weis, Juergen and Fischer, Peer |
Journal: | NANOTECHNOLOGY |
Volume: | 25 |
Number (issue): | 23 |
Year: | 2014 |
Department(s): | Micro, Nano, and Molecular Systems |
Bibtex Type: | Article (article) |
DOI: | 10.1088/0957-4484/25/23/235302 |
Note: | Cover article. |
BibTex @article{ISI:000336958900005, title = {Shape control in wafer-based aperiodic 3D nanostructures}, author = {Hyeon-Ho, Jeong and Mark, Andrew G. and Gibbs, John G. and Reindl, Thomas and Waizmann, Ulrike and Weis, Juergen and Fischer, Peer}, journal = {NANOTECHNOLOGY}, volume = {25}, number = {23}, year = {2014}, note = {Cover article.}, doi = {10.1088/0957-4484/25/23/235302} } |